The SEMATECH ALD equipment forum will run from February 17th-20th in San Diego and will focus on the following topics:

– Equipment Cost of Ownership
– Defect Reduction
– Precursor Qualification
– Maintenance Best Practice
– Process Control / FDC

This forum is being supported by HKE, TEL and others; with high volume manufacturing Fab engineers participating from: Intel, IBM, Samsung, UMC, Winbond, Macronix, GlobalFoundries, TSMC, Renesas, Freescale and HP. We are focusing on both oxides and metal nitrides.