Art Zafiropoulo , the Chairman and Chief Executive Officer of Ultratech reported on Cambridge Nanotech integration into Ultratech in a Q4 2013 Results – Earnings Call transcripetd by Seeking Alpha.

“We also integrated our
asset acquisition of Cambridge Nanotechnology. We manufacture the most flexible
and successful atomic layer deposition systems in the world, for use in
research and specific production applications. A total of 370 systems have been
shipped since its inception a few years ago. The most popular models is
Savannah and Fiji were totally updated and redesigned making these more
flexible and serving the global research institutes and university

On the forecast of ALD systems
sales in 2014 he said “This year we’ll be probably in the range of 50
systems…” and he went on “… we hope to diversify more than we are today
and hopefully outside the semiconductor industry and my objective is to move
into the medical field and the MEMS area and sensors if we can.”

The complete transcript of the
call is available here: Seeking Alpha

For all ALD maniacs out there I can realy recomend to spend some time on Cambridge Nanotech´s web – it is realy informative : Cambridge Nanotech. Especially interesting is the Knowledge center with customer papers, tutorials an more. Earlier they used to have a very good Abstract database but I have not been able to locate that one since Ultratech bought them.

Here you can read more about their well known ALD systems:

Lab ALD – The Savannah
PEALD – The Fiji
Batch ALD – The Phoenix