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BALD Engineering News Blog

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Probably The Best ALD news blog. Covering new and old developments in Atomic Layer Deposition and Technology. From BALD Engineering:

The SEMATECH ALD equipment forum will run from February 17th-20th in San Diego

Workshops Posted on 2014-01-31 15:08:34

The SEMATECH ALD equipment forum will run from February 17th-20th in San Diego and will focus on the following topics:

– Equipment Cost of Ownership
– Defect Reduction
– Precursor Qualification
– Maintenance Best Practice
– Process Control / FDC

This forum is being supported by HKE, TEL and others; with high volume manufacturing Fab engineers participating from: Intel, IBM, Samsung, UMC, Winbond, Macronix, GlobalFoundries, TSMC, Renesas, Freescale and HP. We are focusing on both oxides and metal nitrides.

The 2nd International Conference on ALD Applications & 3rd China ALD Conference Oct 16 2014

Conferences Posted on 2014-01-31 14:57:49

The 2nd International Conference on ALD Applications & 3rd China ALD conference will be will be held in Shanghai, China, from October 16 to 17, 2014. It will be a two-day meeting, dedicated to the fundamental, materials, and applications of Atomic Layer Deposition (ALD) technology. It Following the success of the 1st and 2nd China ALD Scientific Meeting in 2010 and 2012, the 3rd China ALD 2014 conference will feature plenary sessions, poster sessions and an industrial exhibition. Papers submitted by students will be eligible for the“Best Student Paper Awards”

This conference will cover all aspects of ALD:
* ALD Precursors and Precursor Design
* Simulation, Modeling, and Theory of ALD
* ALD Surface Chemistry
* Surface Preparation for ALD
* Initiation of ALD Growth
* Patterned and Selective Area ALD
* In-situ Monitoring and Analysis
* Radical, Plasma and Other Energy-Enhanced ALD Methods
* Equipment and Manufacturing
* Applications of ALD for Microelectronics and Nanotechnology
* ALD for MEMS
* ALD for Catalytic, Photovoltaic, Optical, Magnetic Materials
* Characterization of ALD Coatings

September 15, 2014—Abstract Submission Ends
September 20, 2014—Preregistration Opens
Please submit your abstract for Oral or Poster presentation to the
Email address: and

Full contributed papers will be peer reviewed and published
in a special issue Nanoscale Research Letters (2013 impact factor: 2.52).

SMEs like Beneq – could be the key to Finnish economic success

ALD Equipment Posted on 2014-01-31 14:15:02

YLE reports on the display technology form Finnish ALD Company BENEQ:The Finnish economy is in dire need of new export business. In the past, Finnish exports have mainly been driven by major corporations. However, big company job opportunities are now few and far between. The future seems to lie with smaller export business, such as Beneq, which manufactures see-through displays.

A Beneq see-through display in the hands of the company CEO Sampo Ahonen. [Image from]

Read the full story on

Good news on Cambridge Nanotech

ALD Equipment Posted on 2014-01-31 12:08:56

Art Zafiropoulo , the Chairman and Chief Executive Officer of Ultratech reported on Cambridge Nanotech integration into Ultratech in a Q4 2013 Results – Earnings Call transcripetd by Seeking Alpha.

“We also integrated our
asset acquisition of Cambridge Nanotechnology. We manufacture the most flexible
and successful atomic layer deposition systems in the world, for use in
research and specific production applications. A total of 370 systems have been
shipped since its inception a few years ago. The most popular models is
Savannah and Fiji were totally updated and redesigned making these more
flexible and serving the global research institutes and university

On the forecast of ALD systems
sales in 2014 he said “This year we’ll be probably in the range of 50
systems…” and he went on “… we hope to diversify more than we are today
and hopefully outside the semiconductor industry and my objective is to move
into the medical field and the MEMS area and sensors if we can.”

The complete transcript of the
call is available here: Seeking Alpha

For all ALD maniacs out there I can realy recomend to spend some time on Cambridge Nanotech´s web – it is realy informative : Cambridge Nanotech. Especially interesting is the Knowledge center with customer papers, tutorials an more. Earlier they used to have a very good Abstract database but I have not been able to locate that one since Ultratech bought them.

Here you can read more about their well known ALD systems:

Lab ALD – The Savannah
PEALD – The Fiji
Batch ALD – The Phoenix